Mechanical Performance

• Cold field emission (CFE) gun optimized for low-voltage, high-resolution imaging with low aberration
  (Regulus8220/8230/8240: 0.7 nm/1 kV; Regulus8100: 0.8 nm/1 kV)
• Maximum magnification doubled from 1 million times to 2 million times^*2
• User-support functions to ensure high performance

The test machine measures and records the spring force and the contact resistance of each spring pin at the specific working height and how it changes over the pin's life time. Typically, the spring gets stiffer over time, resulting in a higher contact resistance.

Function: Spring force test 
                Contact resistance test